imec Leuven (Headquarters)
Operational; the organisation this record names is not established in any role by its cited source
imec headquarters and semiconductor research campus in Leuven. Its 300 mm cleanroom received an ASML EXE:5200 High NA EUV system, announced on 18 March 2026; full tool qualification was anticipated for Q4 2026. Campus operation does not establish qualification of this tool. Headquarters details come from an undated imec page.
Source: imec disclosures
Date in site records: Mar 18, 2026. Site data: imec disclosures.
Ownership and operation
Recorded operator attribution withheld imec. The cited source does not establish that this organisation operates the site. “With the installation of the EXE:5200 High NA EUV lithography system into our 300mm cleanroom in Leuven (Belgium), we aim to bring these High NA EUV patterning technologies to an industry-relevant scale” source
Equipment supplier
Export controls and government links
No export-control designations were found in the checked company chains.
Headquarters jurisdiction
A company in the ownership chain is headquartered in Belgium
Belgium: Regional licensing authorities (Flemish, Walloon, Brussels) administer the EU dual-use regulation. Export-control regimes listed for this jurisdiction: Wassenaar Arrangement, EU Dual-Use Regulation 2021/821, EU Delegated Regulation 2025/2189.
Capacity
No power figure is recorded for this site.